Abstract
The study of character of metal film is a hotspot all the time. For metal film the most important characteristic dimension is film thickness which directly affect the service performance of the film thickness, and almost all the service performance is relevant to its thickness, especially the film with thin thickness, its size effect will be apparent. Therefore, the measurement of film thickness become more important. At first, background and apply field of film are introduced. In order to measure the thickness, how to produce the film is significant. Different kinds of ways to produce film are introduced next. This article is mainly about the measurement of film thickness based on its absorption characteristic of light intensity. Actually, the relation between transimision and film thickness can be measured by experiments. Attenuation caused by the lamp-house passing through the film is relevant to its thickness, so film thickness will be measured according to this relation.
Keywords: absorb、film thickness、transmissivity、thickness measurement
