Abstract
Since the mid-1980s, Micro Electromechanical System has attracted an extensive attention by the developed countries, which is considered an emerging technology can be broadly applied in the 21st century. The micro beam structures are used in Micro Electromechanical System, so the study of micro-beam is important on the MEMS system design. Considering the influence of electrostatic force edge effect, first order control equations of a large deflection bending micro beam was deduced by degenerate differential equations of a large deflection bending thin plate. The large deflection deformation of a micro beam is a boundary value problem. In this paper, the shooting method was adopted to change the boundary value into initial value problem. By means of the high precision iterative refinement extended homogeneous capacity integration method, a simple and wide use computational model and method was established to analyze the deformation of a large deflection bending micro beam. In order to guarantee the convergence and stability in solving nonlinear algebraic equations, an incremental iterative algorithm was put forward according the load characteristic. The effect of an edge effects and large deflection deformation to static characteristics of the micro-beam were analyzed. Numerical calculated results show that the proposed method is more accurate and stable, which is an effective method to analyze the large deflection deformation of a micro beam.
Key words: micro beam;large deflect;shooting method;high precision direct integration;incremental iterative