The Turn of Planar Spiral-shaped Coil Influence on The Ignition Forward Power about Micro ICP
ABSTRACT
In detecting the chemical composition of materials, the Optical Spectrometer is one of the most important methods. Excitation source is an important functional component of the Optical Emission Spectrometer (OES). With the inductively coupled plasma (ICP) has a great many merits, it is always applied to OES. In this paper maked a summary of mICP source of its devices and principles. The research and application status of mICP in this time at home and abroad is described briefly. The parameter optimization of microcircuit module is the number of the turn of the planar spiral-shaped coil. When the radio frequency supply power is 13.56MHz, the external diameter is 10 mm and 15 mm, perform the experiment with the relationship between the number of the turn(3,4,5 is selected) and igniting/maintaining power of the mICP source. And the data of the experiment is obtained. The result of this experiment indicate that :For the external diameter is 10 mm, when the number of the turn is 3, the igniting power reach the minimum value(9.5W); when the number of the turn is 5, the maintaining power reach the minimum value(0.8W). For the external diameter is 10 mm, when the number of the turn is 3 the igniting power and the maintaining power both reach the minimum value, separately is 6.8 W and 0.8W.
